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X-Ray Measurements of Half-Widths of Intrinsic Rocking Curve of Copper-Doped Silicon Wafers by means of Double-Crystal Technique

机译：用双晶体技术测量掺铜硅晶片本征摇摆曲线半峰的X射线

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近浦吉則; 山田啓義;
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年度 1980
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正文语种 ja
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4. Mosaicity and Wafer Bending in SiC Wafers as Measured by Double and Triple Crystal X-Ray Rocking Curve and Peak Position Maps [C] . K.W. Kirchner, K.A. Jones, M.A. Derenge, European Conference on Silicon Carbide and Related Materials . 2007

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5. Statistical optimization and analysis of X-ray rocking curves: Application to epitaxial alloys of silicon, germanium, and gallium arsenide [D] . Staley, Thomas William. 1997

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6. Improvement of polycrystalline silicon wafer solar cell efficiency by forming nanoscale pyramids on wafer surface using a self-mask etching technique [O] . Hsin-Han Lin, Wen-Hwa Chen, Franklin C.-N. Hong -1

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7. Half-width of Rocking Curve by X-Ray Double Crystal Spectrometer [O] . 吉沢勲, ヨシザワイサオ, YOSHIZAWA isao 1967

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8. Evaluation of the Quality of Sapphire Using X-ray Rocking Curves and Double-Crystal X-Ray Topography. [R] . Adams, P. M. 1994

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X-Ray Measurements of Half-Widths of Intrinsic Rocking Curve of Copper-Doped Silicon Wafers by means of Double-Crystal Technique

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