Effects of niobium doping on lead zirconate titanate films deposited by a sol-gel route

摘要

Niobium (Nb)-doped lead zirconate titanate (PZT) films have been prepared on platinized silicon substrates using a sol-gel method. The Zr/Ti ratios of the films are 53/47 and 40/60, and the Nb doping level ranges from 0 mol% to 3 mol%. Similar to the cases in bulk ceramics, after the doping with Nb, the remanent polarization Pr, effective transverse piezoelectric coefficients e31,c and pyroelectric coefficient p of the PZT films increase; but the longitudinal effective piezoelectric coefficient d 33,c remains roughly unchanged. At the optimum Nb doping levels, the observed Pr, -e31,c and p reach a maximum value of 30 μC/cm2, 18 C/m2 and 350 μC/m2 K, respectively, for the PZT (53/47) films, and 37 μC/cm2, 7.9 c/m2 and 370 μC/m2 K for the PZT (40/60) films. Our results also reveal that there exist linear relations between p, e 31,c/εr and Pr.