Optical degradation of indium tin oxide thin films induced by hydrogen-related room temperature reduction

摘要

The optical degradation of indium tin oxide (ITO) thin films due to a hydrogen-related room temperature reduction reaction was reported. The thin films were treated in an electrolysis process. Significant decrease in the optical transmission of the treated samples was observed. Compositional and structural changes in ITO caused by the reaction related to atomic hydrogen generated in the electrolysis of water was found to be responsible for the degradation. X-ray diffraction and scanning electron microcopy (SEM) observations were employed in the analysis of the products yielded in the reduction reaction.