Barium strontium zirconate titanate (Ba,Sr)(Zr,Ti)O 3 thin films for tunable microwave applications

摘要

(Ba 0.55Sr 0.45)(Zr 0.1Ti 0.9) O 3 (BSZT) thin films were deposited by pulsed laser deposition on LSAT(001) substrates. X-ray diffraction characterization reveals a good quality of crystallization and epitaxial nature of the films. The in-plane dielectric properties of the films were characterized over a wide frequency range from 50 MHz to 20 GHz by using ring resonator-structured samples. Based on the S-parameter measurements and electromagnetic simulation it was found that microwave dielectric constant of the BSZT thin film is ∼350. Large dielectric tunability was also observed in this material.