Structure and properties of PZT thick films prepared by a modified sol-gel process

摘要

Nanosized lead zirconate titanate (PZT) powder prepared by a sol-gel process has been dispersed in a PZT sol-gel solution by ultrasonic agitation to form a stable mixture. The mixture was spin-coated onto stainless steel substrates to form composite films which were then annealed at various temperatures. The crystallization of the composite films was studied by X-ray diffraction. The microstructures, dielectric permittivities and ferroelectric properties of the PZT films were investigated. It was found that the PZT thick films annealed at 600 °C have good ferroelectric properties.