Preparation and characterization of compositionally graded epitaxial barium strontium titanate thin films via scanning probe microscopy

摘要

Epitaxially graded barium strontium titanate (BaxSr 1-x)TiO3 (x = 0.75,0.8,0.9,1.0, abbreviated as BST75, BST80, BST90 and BTO respectively) thin films were fabricated by pulsed laser deposition method on the (La0.7Sr0.3)MnO3 (LSMO)/LaAlO3 (LAO) single crystal substrate. Scanning probe microscopy with a contact mode was used to characterize the temperature dependence of polarization from room temperature to 140°C. Results indicated that the piezo-response signal of the BST graded films had an obvious change with temperature, and that the graded structures had a flatter temperature dependence of permittivity. Furthermore, the contrasts of the SPM images were lower for the ferroelectric - paraelectric (F-P) phase transition temperatures of BST 75, BST 80, and BST90, but higher for the F-P transition temperature of BTO.