Investigation of SU8 as A Structural Material for Fabricating Passive Millimetre-wave and Terahertz Components

摘要

This paper is to provide a systematical review of the technical issues of SU8 fabrication for millimeter-wave and terahertz components based on research works carried out at the University of Birmingham in the past decade. A design-for-manufacturability (DFM) approach is followed. The flexibility of the SU8 process enables many novel device structures. Challenges and problems during the fabrication will be discussed and demonstrated with examples. The measurement of the devices is also a significant challenge when the critical dimensions of the device shrink and special testing fixtures are needed in some cases. Finally, a brief overview of the issues discussed above is given for future guidance.