Finite Ground Coplanar Waveguide Shunt MEMS Switches for Switched Line Phase Shifters

摘要

Switches with low insertion loss and high isolation are required for switched line phase shifters and for transmit/receive switches at the front end of communication systems. The design, fabrication, and characteristics of a Finite Ground Coplanar (FGC) waveguide capacitive shunt MEMS switch implemented on high resistivity Silicon is presented. The switch has a measured insertion loss and return loss of less than 0.35 dB and greater than 11 dB respectively, over the frequency range of 3 to 50 GHz. The measured isolation is greater than 18 dB at 50 GHz.