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Integration of thin film giant magnetoimpedance sensor and surface acoustic wave transponder

机译:薄膜巨磁阻传感器与声表面波转发器的集成

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摘要

Passive and remote sensing technology has many potential applications in implantable devices, automation, or structural monitoring. In this paper, a tri-layer thin film giant magnetoimpedance (GMI) sensor with the maximum sensitivity of 16%/Oe and GMI ratio of 44% was combined with a two-port surface acoustic wave(SAW) transponder on a common substrate using standard microfabrication technology resulting in a fully integrated sensor for passive and remote operation. The implementation of the two devices has been optimized by on-chip matching circuits. The measurement results clearly show a magnetic field response at the input port of the SAW transponder that reflects the impedance change of the GMI sensor.
机译:被动和遥感技术在可植入设备,自动化或结构监视中具有许多潜在应用。本文将具有最大灵敏度16%/ Oe和GMI比为44%的三层薄膜巨磁阻抗(GMI)传感器与两端口表面声波(SAW)应答器组合在一块普通基板上,使用标准的微细加工技术可实现用于被动和远程操作的完全集成的传感器。这两个器件的实现已通过片上匹配电路进行了优化。测量结果清楚地显示了SAW应答器输入端口处的磁场响应,反映了GMI传感器的阻抗变化。

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