MEMS based devices represent an extremely attractive alternative to MESFET devices for realization of the programmable phase shifters. The stable operation of RF MEMS devices is impacted by the actuation voltage, restoration force and the structural stresses. These can induce severe functional deformities into the device leading to operational problems. These parameters can be optimized by the concept of built-in reliability through design. In the present work, the study of Ku band 5-bit MEMS phase shifter was associated with the switch development. The hybrid design topology of switched and loaded line was adopted for the phase shifter. This topology has been the best trade off among large phase shift, low loss and reduced space requirement in the defined frequency band. This approach requires 18 switches per 5-bit phase shifter and all must work simultaneously in order to achieve the phase shifter fully functional. Hence the study was initiated with switch development keeping the focus on the above mentioned parameters.
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