Optimisation des traitements de surface de substrats polymères par plasma et développement de techniques de lithographie douce innovantes pour leur métallisation electroless localisée à basse et très haute résolution

摘要

Molded Interconnected Devices (MID) consist in polymer based substrates with metal tracks at their surface. The aim of this thesis was to optimize surface treatments applied to industrial polymers intended for MID applications, in order to obtain electroless metal coatings exhibiting a high practical adhesion. Furthermore, innovative processes to localize these metal coatings were developed. In this work, surface functionalization based on various operating parameters of microwave plasma using various nitrogen-based atmospheres were studied to obtain palladium (universal catalyst for electroless metallization) adsorption. Designs of experiments were used to identify an optimal set of parameters for PA12 surface treatment to obtain adherent metal coatings (Ni, Cu). These conditions were overall successfully transferred to other industrial polymers (ABS/PC, LCP). The second part of this work consisted in the development of innovative processes based on the use of palladium colloids directly synthetized at the surface of PDMS stamps (soft lithography) to achieve localized metallization using bottom-up and top-down approaches. AFM, SEM, TEM, XPS, ToF-SIMS and wettability measurements allowed to characterise the various surface modifications. These processes made possible 15 μm thick MID metal patterns with satisfactory practical adhesion as well as high resolution and high density sub-micrometric patterns with unseen properties for this technology