A Nonlinear Model for Incorporating the Coupled Effects of Surface Energy and Microstructure on the Electromechanical Stability of NEMS

摘要

Surface energy and size phenomenon can play significant roles in physical performance of nano-electromechanical systems. Herein, the static and dynamic pull-in behavior of nano-tweezers and nano-switch fabricated from conductive cylindrical nano-wires is studied. The Gurtin–Murdoch surface elasticity in combination with the couple stress theory is employed to incorporate the coupled effects of surface energy and microstructure dependency (size phenomenon). Using Green–Lagrange strain, the higher-order surface stress components are incorporated in the nonlinear governing equation. The effect of gas damping is considered in the model as well as structural damping. The governing equation is solved using the reduced order method. The effects of various parameters on the static and dynamic pull-in parameters, phase plans and stability threshold of the nano-structures are demonstrated.