In this contribution, the transient characteristics of benzo cyclo butene (BCB) encapsulated aluminum (Al) micro mechanical resonators as a function of time varying pressure are studied. The quality factor of encapsulated Al resonator showed a drastic change with time of more than 200% reduction. The estimated transient leak rate spans over several orders of magnitude $(10^-^5 to 10^-^9 atm cm^3 s^-^1)$. A theoretical description of Al micro mechanical resonator and the leak rate are presented. Possible causes for the leak rate and the potential solutions are also outlined.
展开▼
机译：在此贡献中，研究了随时间变化的压力，苯并环丁烯（BCB）封装的铝（Al）微机械谐振器的瞬态特性。封装的铝谐振器的品质因数显示出急剧的变化，随着时间的减少超过200％。估计的瞬时泄漏率跨越几个数量级$（10 ^-^ 5到10 ^-^ 9 atm cm ^ 3 s ^-^ 1）$。介绍了铝微机械谐振器的理论描述和泄漏率。还概述了泄漏率的可能原因和可能的解决方案。
展开▼
