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Soft holographic interference lithography microlens for enhanced organic light emitting diode light extraction

机译:用于增强有机发光二极管光提取的软全息干涉光刻微透镜

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摘要

Very uniform 2 μm-pitch square microlens arrays (μLAs), embossed on the blank glass side of an indium-tin-oxide (ITO)-coated 1.1 mm-thick glass, are used to enhance light extraction from organic light-emitting diodes (OLEDs) by ~100%, significantly higher than enhancements reported previously. The array design and size relative to the OLED pixel size appear to be responsible for this enhancement. The arrays are fabricated by very economical soft lithography imprinting of a polydimethylsiloxane (PDMS) mold (itself obtained from a Ni master stamp that is generated from holographic interference lithography of a photoresist) on a UV-curable polyurethane drop placed on the glass. Green and blue OLEDs are then fabricated on the ITO to complete the device. When the μLA is ~15 × 15 mm2, i.e., much larger than the ~3 × 3 mm2 OLED pixel, the electroluminescence (EL) in the forward direction is enhanced by ~100%. Similarly, a 19 × 25 mm2μLA enhances the EL extracted from a 3 × 3 array of 2 × 2 mm2 OLED pixels by 96%. Simulations that include the effects of absorption in the organic and ITO layers are in accordance with the experimental results and indicate that a thinner 0.7 mm thick glass would yield a ~140% enhancement.
机译:非常均匀的2μm节距方形微透镜阵列(μLA)压印在涂有氧化铟锡(ITO)的1.1 mm厚玻璃的空白玻璃面上,用于增强从有机发光二极管的光提取( OLED约100%,大大高于先前报道的增强功能。阵列设计和相对于OLED像素大小的大小似乎是造成这种增强的原因。阵列是通过非常经济的软光刻技术将聚二甲基硅氧烷(PDMS)模具(本身从可从光致抗蚀剂的全息干涉光刻技术产生的Ni主模中获得)压印到放置在玻璃上的可紫外线固化的聚氨酯墨滴上制成的。然后在ITO上制造绿色和蓝色OLED以完成该设备。当μLA为〜15×15 mm2,即比〜3×3 mm2 OLED像素大得多时,正向方向的电致发光(EL)增强〜100%。类似地,19×25mm2μLA可将从2×2 mm2 OLED像素的3×3阵列中提取的EL增强96%。包含有机层和ITO层中吸收效应的模拟结果与实验结果相符,表明更薄的0.7毫米厚的玻璃将产生〜140%的增强。

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