Effect of Annealing Temperature On Iron Doped udTitanium Dioxide Thin Films Prepared udBy Spin Coating Technique

摘要

Iron (Fe) doped titanium dioxide (TiO2) thin films have been successfully deposited by udusing spin coating technique. X-ray diffraction (XRD) and Scanning Electron Microscope ud(SEM) were employed to characterize the microstructure and crystallite morphology of the udfilms. It was indicated that the rutile crystal orientation appears due to increasing annealing udtemperature of the thin films. Furthermore, increasing annealing temperature of the thin udfilms yielded an increasing of porosity value which is related to the application on gas udsensor films. udKeywords: Iron doped titanium dioxide, Spin coating, Porosity value