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Mechanical characterization of individual polycrystalline carbon tubes for use in electrical nano-interconnects

机译:用于电纳米互连的单个多晶碳管的机械特性

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摘要

Polycrystalline carbon tubes were generated by CVD inside electrochemically prepared nano-porous anodic aluminium oxide membranes. This method produced nano-tubes without catalyst, featuring polycrystalline and a few layer thick walls. Individual tubes could be isolated and suspended on microfabricated substrates such that they formed single-side clamped beams. These beams were then used to investigate their mechanical properties employing electrostatic forces for bending the tubes beyond their mechanical stability where pull-in occurs, which could be detected by monitoring the current flowing from the tube to the substrate.
机译:通过CVD在电化学制备的纳米多孔阳极氧化铝膜内部产生多晶碳管。该方法生产的无催化剂的纳米管具有多晶和几层厚的壁。可以将各个管隔离并悬挂在微型基板上,以使它们形成单面夹紧梁。然后使用静电力弯曲电子管,以使电子管弯曲,使其超出发生拉入的机械稳定性,从而通过监测从电子管流向基板的电流来检测其机械性能。

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