Monolithic Carbide-Derived Carbon Films for Micro-Supercapacitors

摘要

Microbatteries with dimensions of tens to hundreds of micrometers that are produced byudcommon microfabrication techniques are poised to provide integration of power sources ontoudelectronic devices, but they still suffer from poor cycle lifetime, as well as power and temperatureudrange of operation issues that are alleviated with the use of supercapacitors. There have been audfew reports on thin-film and other micro-supercapacitors, but they are either too thin to provideudsufficient energy or the technology is not scalable. By etching supercapacitor electrodes intoudconductive titanium carbide substrates, we demonstrate that monolithic carbon films lead to audvolumetric capacity exceeding that of micro- and macroscale supercapacitors reported thus far,udby a factor of 2. This study also provides the framework for integration of high-performanceudmicro-supercapacitors onto a variety of devices.