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Polyimide use in photolithography process

机译:聚酰亚胺在光刻工艺中的用途

摘要

Polyimides thanks to the unique properties such us thermal stability, good mechanical and electrical characteristic, resistance to high energy a wide temp erature range, excellent planarization popular in engineering and technology, particular in microelectronics. The production efficiency can be improved by providing photoresist properties to the polyimide materials using in microelectronics technology due to reduction of process steps and low bad production. Conversation is about, the creation of photosensitive pol-yimides negative and positive type containing reactive groups, which can by capable of being polymerized by UV-light with photo initiator. The main aim of this work increase the sensitivity, resolution and heat resistance of the material, on the base of a photosensitive polyimide composition. A new photosensitive polyimide composition based on polyamide acid solution in an organic solvent, tetramaleinamidoasid with the light-sensitive component. As show in the article, the possibility to create polymer cposs-linked structure which can explain solubility difference after UV-radiation exposure in the chemical natural of the compounds. The composition has shown good results in photosensitivity and other properties.
机译:聚酰亚胺的独特性能包括:热稳定性,良好的机械和电气特性,在宽温度范围内对高能量的耐受性,在工程技术领域(特别是在微电子领域)广受欢迎的出色平面化性能。通过减少工艺步骤和减少不良生产,通过在微电子技术中使用聚酰亚胺材料提供光致抗蚀剂性能,可以提高生产效率。讨论的内容是,创建带有反应性基团的负型和正型光敏多酰亚胺,可以通过紫外线与光引发剂进行聚合。这项工作的主要目的是在感光性聚酰亚胺组合物的基础上提高材料的灵敏度,分辨率和耐热性。一种基于聚酰胺酸在有机溶剂中的溶液的新型光敏聚酰亚胺组合物,四马来酰胺基可与光敏组分共存。如文章中所示,可以创建聚合物cposs-linked结构,该结构可以解释UV辐射暴露于化合物的化学天然状态后的溶解度差异。该组合物在光敏性和其他性能方面显示出良好的结果。

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