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Direct patterning of oxides: From nanoimprint lithography to self-assembly of block copolymers

机译：氧化物的直接图案化：从纳米压印光刻到嵌段共聚物的自组装

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SAMAN SAFARI DINACHALI;
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年度 2014
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1. Soft Graphoepitaxy for Large Area Directed Self-Assembly of Polystyrene-block-Poly(dimethylsiloxane) Block Copolymer on Nanopatterned POSS Substrates Fabricated by Nanoimprint Lithography [J] . Borah Dipu, Rasappa Sozaraj, Salaun Mathieu, Advanced Functional Materials . 2015,第22期

机译：纳米压印光刻技术制备的纳米图案POSS衬底上的聚苯乙烯嵌段聚二甲基硅氧烷嵌段共聚物大面积定向自组装的软石墨外延
2. Integration of nanoimprint lithography with block copolymer directed self-assembly for fabrication of a sub-20 nm template for bitpatterned media [J] . XiaoMin Yang, Shuaigang Xiao, Wei Hu, Nanotechnology . 2014,第39期

机译：纳米压印光刻技术与嵌段共聚物定向自组装的集成，用于制造位图介质的20 nm以下模板
3. Nanopatterning via Self-Assembly of a Lamellar-Forming Polystyrene- block -Poly(dimethylsiloxane) Diblock Copolymer on Topographical Substrates Fabricated by Nanoimprint Lithography [J] . Dipu Borah, Cian Cummins, Sozaraj Rasappa, Nanomaterials . 2018,第1期

机译：通过自组装形成层状的聚苯乙烯嵌段-聚（二甲基硅氧烷）二嵌段共聚物在纳米基底上制备纳米图案
4. Fabrication of templates with rectangular bits on circular tracks by combining block copolymer directed self-assembly and nanoimprint lithography [C] . Lei Wan, Ricardo Ruiz, He Gao, Alternative lithographic technologies IV. . 2012

机译：通过结合嵌段共聚物定向自组装和纳米压印光刻技术，在圆形轨道上制作具有矩形位的模板
5. Directed self-assembly of block copolymers in thin films on surfaces patterned by electro-oxidation nanolithography [D] . Xu, Ji 2011

机译：嵌段共聚物在薄膜上的定向自组装，该薄膜在通过电氧化纳米光刻法图案化的表面上
6. Nanopatterning via Self-Assembly of a Lamellar-Forming Polystyrene-block-Poly(dimethylsiloxane) Diblock Copolymer on Topographical Substrates Fabricated by Nanoimprint Lithography [O] . Dipu Borah, Cian Cummins, Sozaraj Rasappa, 2018

机译：通过自组装形成层状聚苯乙烯嵌段聚（二甲基硅氧烷）二嵌段共聚物通过纳米压印光刻技术制备的纳米图案。
7. Nanopatterning via Self-Assembly of a Lamellar-Forming Polystyrene-block-Poly(dimethylsiloxane) Diblock Copolymer on Topographical Substrates Fabricated by Nanoimprint Lithography [O] . Dipu Borah, Cian Cummins, Sozaraj Rasappa, 2018

机译：通过纳米压印光刻制备的局部基底上的层状聚苯乙烯 - 嵌段 - 聚（二甲基硅氧烷）二嵌段共聚物的自组装纳米图案

Direct patterning of oxides: From nanoimprint lithography to self-assembly of block copolymers

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