New structures of micro-pump, biosensor in LOC (Lab-on-a-Chip) are studied. A round-path-chamber pumping principle is proposed to depress output fluctuation and increase output pressure of micro valve-less mechanical pump. Its prototype produces higher output pressure than the one with traditional column chamber. Two types of metal nanostructure array for LSPR (Localized Surface Plasmonic Resonance) biosensor were fabricated and tested, showing high sensitivity. Micro-channel is also discussed for realizing laminar flow above the metal nano-particles, to enable analytic samples to contact the metal nano-particles fully and stably.
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