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Hot filament chemical vapour deposition and wear resistance of diamond films on WC-Co substrates coated using PVD-arc deposition technique

机译:使用PVD电弧沉积技术在WC-Co基底上进行热丝化学气相沉积和金刚石膜的耐磨性

摘要

Different Cr- and Ti-base films were deposited using PVD-arc deposition onto WC-Co substrates, and multilayered coatings were obtained from the superimposition of diamond coatings, deposited on the PVD interlayer using hot filament chemical vapour deposition (HFCVD). The behaviour of PVD-arc deposited CrN and CrC interlayers between diamond and WC-Co substrates was studied and compared to TiN, TiC, and Ti(C,N) interlayers. Tribological tests with alternative sliding motion were carried out to check the multilayer (PVD+ diamond) film adhesion on WC-Co substrate. Multilayer films obtained using PVD arc, characterised by large surface droplets, demonstrated good wear resistance, while diamond deposited on smooth PVD TiN films was not adherent. Multilayered Ti(C,N)+diamond film samples generally showed poor wear resistance. Diamond adhesion on Cr-based PVD coatings deposited on WC-Co substrate was good. In particular, CrN interlayers improved diamond film properties and 6 gm-thick diamond films deposited on CrN showed excellent wear behaviour characterised by the absence of measurable wear volume after sling tests. Good diamond adhesion on Cr-based PVD films has been attributed to chromium carbide formation on PVD film surfaces during the CVD process. (c) 2005 Elsevier B.V. All rights reserved.
机译:使用PVD电弧沉积将不同的Cr和Ti基膜沉积到WC-Co基板上,并通过使用热丝化学气相沉积(HFCVD)沉积在PVD中间层上的金刚石涂层的叠加获得多层涂层。研究了金刚石和WC-Co衬底之间PVD弧沉积的CrN和CrC中间层的行为,并将其与TiN,TiC和Ti(C,N)中间层进行了比较。进行了交替滑动运动的摩擦学测试,以检查多层(PVD +金刚石)膜在WC-Co基材上的附着力。使用PVD电弧获得的多层膜具有较大的表面液滴,表现出良好的耐磨性,而沉积在光滑的PVD TiN膜上的金刚石则没有粘附性。多层Ti(C,N)+金刚石薄膜样品通常显示出较差的耐磨性。沉积在WC-Co基材上的Cr基PVD涂层上的金刚石附着力良好。特别是,CrN中间层改善了金刚石膜的性能,在CrN上沉积的6 gm厚的金刚石膜表现出出色的磨损性能,其特征是在悬吊测试后没有可测量的磨损量。在Cr基PVD膜上良好的金刚石附着力归因于在CVD工艺期间在PVD膜表面形成碳化铬。 (c)2005 Elsevier B.V.保留所有权利。

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