Polyvinylidene fluoride - based MEMS tactile sensor for minimally invasive surgery

摘要

Minimally invasive surgery (MIS) procedures have been growing rapidly for the past couple of decades. In MIS operations, endoscopic tools are inserted through a small incision on human's body. Although these procedures have many advantages such as fast recovery time, minimum damage to human body and reduced post operative complications, it does not provide any tactile feedback to the surgeon. This thesis reports on design, finite element analysis, fabrication and testing of a micromachined piezoelectric endoscopic tactile sensor. Similar to the commercial endoscopic graspers, the sensor is teeth like in order to grasp slippery tissues. It consists of three layers; the first layer is a silicon layer of teeth shapes on the top and two supports at the bottom forming a thin plate and a U-Channel. The second layer is a patterned Polyvinylidene Fluoride (PVDF) film, and the third layer is a supporting Plexiglas. The patterned PVDF film was placed on the middle between the other two layers. When a concentric load is applied to the sensor, the magnitude and the position of the applied load are obtained from the outputs of the sensing elements which are sandwiched between the silicon supports and the Plexiglas. In addition, when a soft object/tissue is place on the sensor and load is applied the degree of the softness/compliance of the object is obtained from the outputs from the middle PVDF sensing elements, which are glued to the back of the thin silicon plate. The outputs are related to the deformation of the silicon plate which related to the contacting object softness. The sensor has high sensitivity and high dynamic range as a result it can potentially detect a small dynamic load such as a pulse load as well as a high load such as a firm grasping of a tissue by an endoscopic grasper. The entire surface of the tactile sensor is also active, which is an advantage in detecting the precise position of the applied point load on the grasper. The finite element analysis and experimental results are in close agreement with each other. The sensor can potentially be integrated with the gasper of a commercially available endoscopic grasper