Photoelectrochemical fabrication of stainless steel filter elements

摘要

Precision fabrication of stainless steel filters is described. Controlled depth (10 mu m) of metal removal was achieved by an anodic dissolution technique. In addition this technique gave a very smooth surface finish. The limitations encountered in chemical milling methods were largely overcome by this method. Unlike the conventional ECM technique, a plane cathode (instead of a shaped cathode) is used in conjunction with photolithographic masking because by using a shaped cathode alone it is not possible to get the accuracy needed. Photolithographic masking and control of electrochemical parameters ensure accuracy.