Citation: Baboly, M. G., Alaie, S., Reinke, C. M., El-Kady, I., & Leseman, Z. C. (2016). Ultra-high frequency, high Q/volume micromechanical resonators in a planar AlN phononic crystal. Journal of Applied Physics, 120(3), 5. doi:10.1063/1.4958671
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