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Hardness and scratch response of PVD multilayer coatings

机译:PVD多层涂层的硬度和划痕响应

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摘要

In the present investigation, novel Cr/CrN, CrN/CrAlN and Cr/CrN/CrAlN multilayered coatings thin films have been developed by dual RF magnetron sputtering. They consist of superposing Cr, CrN and CrAlN layers of 50–500nm thick, up to a total thickness of 0.45–1μm. These coatings were grown on AISI4140 steel samples. The mechanical properties of these coatings were studied by scratch-tests and nano-indentationmeasurements. The hardness of the films reaches 15.8 GPa for a Cr/CrN multilayered coating sputtered at a bias voltage of -900V. High peak load tests were used to estimate the film adhesion on steel substrates; critical loads (Lc2) of 11N showed weak adhesion properties of the film. Moreover, an inventory of the major scratch-tests failure modes was established, which were classified into plastic deformation and different forms of cracking, spallation and coating perforation events. No evidence of interfacial failure(s) of the sub-layers was observed after the adhesion and nanoindentation tests.
机译:在本研究中,已经通过双射频磁控溅射技术开发了新型的Cr / CrN,CrN / CrAlN和Cr / CrN / CrAlN多层涂层薄膜。它们由厚度为50–500nm的Cr,CrN和CrAlN层叠加而成,总厚度为0.45–1μm。这些涂层在AISI4140钢样品上生长。通过刮擦测试和纳米压痕测量研究了这些涂层的机械性能。对于在-900V偏置电压下溅射的Cr / CrN多层涂层,膜的硬度达到15.8 GPa。高峰值载荷测试用于估计在钢基材上的薄膜附着力; 11 N的临界载荷(Lc2)显示了薄膜的弱粘合性能。此外,建立了主要划痕测试失败模式的清单,这些模式分为塑性变形和不同形式的开裂,剥落和涂层穿孔事件。在粘附和纳米压痕测试后,未观察到亚层的界面破坏迹象。

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