A simple and generic CAD/CAM approach for AFM probe-based machining

摘要

Atomic Force Microscopy (AFM) probe-based machining allows surface structuring at the nano-scale via the mechanical modification of material. This results from the direct contact between the tip of an AFM probe and the surface of a sample.Given that AFM instruments are primarily developed for obtaining high-resolution topography information of inspected specimen, raster scanning typically defines the trajectory followed by the tip of an AFM probe. Although most AFM manufacturers provide software modules to perform user-defined tip displacement operations, such additional solutions can be limited with respect to 1) the range of tip motions that can be designed, 2) the level of automation when defining tip displacement strategies and 3) the portability for easily transferring trajectories data between different AFM instruments. In this context, this research presents a feasibility study, which aims to demonstrate the applicability of a simple and generic CAD/CAM approach when implementing AFM probe-based nano-machining for producing two-dimensional (2D) features with a commercial AFM instrument.