High speed e-beam writing for large area photonic nanostructures—a choice of parameters

摘要

This work is supported by Ministry of Science and Technology of China (2016YFA0301300), Guangzhou science and technology projects (201607010044, 201607020023), Natural Science Foundation of Guangdong (2016A030312012), National Natural Science Foundation of China (11674402), Open research project of the State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen University of China (OEMT-2015-KF-12, OEMT-2015-KF-13), the Fundamental Research Funds for the Central Universities, EPSRC of U.K. under Grant EP/J01771X/1 (Structured Light) and the São Paulo Research Foundation (FAPESP #2016/05809-0). Kezheng Li is also supported by the aboard exchange scholar and international doctoral cooperative project of Sun Yat-sen university.