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Low temperature plasma deposition of silicon thin films: From amorphous to crystalline

机译：硅薄膜的低温等离子体沉积：从非晶态到结晶态

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International audience

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Roca I Cabarrocas Pere; Cariou Romain; Labrune Martin;
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年度 2012
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1. Low temperature plasma deposition of silicon thin films: From amorphous to crystalline [J] . Roca I Cabarrocas P., Cariou R., Labrune M. Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites . 2012,第17期

机译：硅薄膜的低温等离子体沉积：从非晶态到结晶态
2. Microcrystalline/Amorphous Thin Si Films Deposition by a Newly Developed Dual Injection System Employing Hydrogen Plasma and Silicon Radicals at Low Temperature (300℃) Chemical Vapor Deposition Process [J] . Toru Takeda, Kouji Tanaka, Hirotada Inoue, Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2007,第4B期

机译：在低温（300℃）化学气相沉积工艺中采用氢等离子体和硅自由基的新型双注入系统沉积微晶/非晶硅薄膜
3. Amorphous Silicon Film Deposition by Low Temperature Catalytic Chemical Vapor Deposition ( < 150℃) and Laser Crystallization for Polycrystalline Silicon Thin-Film Transistor Application [J] . Sung-Hyun LEE, Wan-Shick HONG, Jong-Man KIM, Japanese Journal of Applied Physics. Part 2, Letters & Express Letters . 2006,第8a11期

机译：低温催化化学气相沉积（<150℃）和激光晶化的非晶硅膜沉积在多晶硅薄膜晶体管中的应用
4. Reaction prcesses for low temperature (<150 deg C) plasma enhanced deposition of hydrogenated amorphous silicon thin film transistors on transparent plastic substrates [C] . Gregory N.Parsons, Chien-Sheng Yang, Tonya M.Klein, Symposium on amorphous and microcrystalline silicon technology . 1999

机译：低温（<150摄氏度）等离子体的反应过程增强了氢化非晶硅薄膜晶体管在透明塑料基板上的沉积
5. Thin film silicon by a microwave plasma deposition technique: Growth and devices, and, interface effects in amorphous silicon/crystalline silicon solar cells. [D] . Jagannathan, Basanth. 1998

机译：通过微波等离子体沉积技术的薄膜硅：非晶硅/晶体硅太阳能电池中的生长和器件以及界面效应。
6. Low-Temperature Growth of Hydrogenated Amorphous Silicon Carbide Solar Cell by Inductively Coupled Plasma Deposition Toward High Conversion Efficiency in Indoor Lighting [O] . Ming-Hsuan Kao, Chang-Hong Shen, Pei-chen Yu, -1

机译：感应耦合等离子体沉积在室内照明中实现高转化效率的低温生长氢化非晶碳化硅太阳能电池
7. Low temperature plasma deposition of silicon thin films: From amorphous to crystalline [O] . 2013

机译：硅薄膜的低温等离子体沉积：从非晶态到结晶态
8. Low Temperature Pulsed Plasma Deposition. Part 2. The Production of Novel Amorphous Compounds of Germanium in Thin Film [R] . Scarsbrook, G. A., Llewellyn, I. P., Heinecke, R. A. 1988

机译：低温脉冲等离子体沉积。第2部分。薄膜中锗的新型无定形化合物的制备

Low temperature plasma deposition of silicon thin films: From amorphous to crystalline

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