A study of nano structure by roll to roll imprint lithography

摘要

Imprint lithography process is a unique printingtechnique that create graphic, electronic and biomedical printedon substrates. PET plastics are an example of materials that canbe used as printing substrate in producing nano-scale electronicand medical devices. Here, it is proposed that extending imprintlithography technique into the multiple nano-structure printingfine solid lines onto substrate. Imprint lithography is a low costprinting technique commonly used in manufacturing andprinting industry. This study exhibit successful fine solid linesimprinting below 1 micrometer in line width, gap and height onpolyethylene-terephthalate (PET) substrate. This paperillustrates the use of imprint lithography method in producingmultiple nano-solid lines printing capability as application ofprinting electronic, graphic and bio-medical.