XPS and Auger study of the radial variations of diamond thin films grown by the oxy-acetylene flame method

摘要

Free standing diamond thin films grown by the oxy-acetylene flame method have been investigated by X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES), The radial distribution of the sp2-hybridized carbon species on the films and, consequently, the film quality, have been determined. While XPS does not seem to be an appropriate technique to distinguish between very small variations in firm quality, an analysis of the Auger widths can explain the differences observed by scanning electron microscopy (SEM) and optical microscopy in the different regions of the samples.