Laser direct-write technique for fabricating microlens arrays on soda-lime glass with a Nd:YVO4 laser

摘要

A one-step direct-write technique for fabricating spherical microlenses on soda-lime glass substrates is described. Using a Q switched Nd:YVO4 laser combined with a galvanometer system, square and triangular microlens arrays were fabricated. The focal length of microlenses is measured using direct and nondirect methods. Values around 118 and 125 μm were obtained for the microlens focal length of square and triangular arrays, respectively. A noncontact profilometer is used for determining the surface roughness of square and triangular arrays. Results are compared with that of glass substrate. © 2010 Optical Society of America.