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All-optical characterization of single femtosecond laser-pulse-induced amorphization in silicon

机译:飞秒激光脉冲诱导的硅非晶化的全光学表征

摘要

The non-destructive optical imaging method of scanning laser microscopy has been used to evaluate quantitatively the thickness of an amorphous layer induced by a single, spatially Gaussian-shaped 130-fs Ti:sapphire laser pulse on n-doped single-crystalline 〈111〉-silicon wafers for laser fluences between melting and ablation threshold. A parabolic thickness profile exhibiting a maximum value of approximately 60 nm has been found for fluences of 80% of the ablation threshold value by means of scanning laser microscopy in combination with a thin film optical model. This suggests that the melt and the amorphous layer thickness are linearly related to each other.
机译:扫描激光显微镜的非破坏性光学成像方法已被用于定量评估n掺杂单晶上的单个空间高斯形130-fs Ti:蓝宝石激光脉冲诱导的非晶层的厚度<111> -硅晶片,用于在熔化和烧蚀阈值之间进行激光注量。通过扫描激光显微镜结合薄膜光学模型,已经发现对于80%的烧蚀阈值的通量,呈现出约60nm的最大值的抛物线厚度轮廓。这表明熔体和非晶层的厚度彼此线性相关。

著录项

  • 作者

    Bonse J.;

  • 作者单位
  • 年度 2012
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  • 原文格式 PDF
  • 正文语种 eng
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