[[abstract]]Both the workable micropump and microejector actuated by the shear mode PZT actuators are successfully fabricated. They are based on a similar design and the same process that uses UV-LIGA multi-level electroforming technology. The micropump consists of a vibration plate and a chamber plate while the microejector consists of the same vibration plate and a nozzle plate. The AZ 9260 positive photoresist is used as the electroforming mould. The two alternating steps, the photoresist patterning and nickel electroforming, make components form a quasi 3-D (or 2.5-D) multilevel microstructure. An over-electroforming technique is employed to form the nozzles in nozzle plate for the microejector.Some useful experimental data about the over-electroforming is proposed to predict and control the orifice diameter. The volume change of the chamber is estimated by both the numerical solution and actual measurement. The liquid ejection of the microejector is observed by a visualization system.
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机译：[[摘要]]成功制造了可工作的微型泵和由剪切模式PZT致动器致动的微型喷射器。它们基于使用UV-LIGA多级电铸技术的相似设计和相同工艺。微型泵由振动板和腔室板组成，而微型喷射器由相同的振动板和喷嘴板组成。 AZ 9260正性光刻胶用作电铸模具。光致抗蚀剂构图和镍电铸这两个交替的步骤使组件形成准3-D（或2.5-D）多层微结构。采用过电铸技术在微喷射器的喷嘴板上形成喷嘴。提出了一些有用的关于过电铸的实验数据，以预测和控制孔口直径。腔室的体积变化可以通过数值解和实际测量来估算。通过可视化系统观察微喷射器的液体喷射。
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