Device and Circuit Performance of the Future Hybrid III-V and Ge-Based CMOS Technology

摘要

The device and circuit performance of a 20-nm gate length InGaAs and Ge hybrid CMOS based on an implant free quantum well (QW) device architecture is studied using a multiscale approach combining ensemble Monte Carlo simulation, drift-diffusion simulation, compact modeling, and TCAD mixed-mode circuit simulation. We have found that the QW and doped substrate, used in the hybrid CMOS, help to reduce short-channel effects by enhancing carrier confinement. The QW also reduces the destructive impact of a low density of states in III-V materials. In addition, the calculated access resistance is found to be a much lower than in Si counterparts thanks to a heavily doped overgrowth source/drain contact. We predict an overall low gate capacitance and a large drive current when compared with Si-CMOS that leads to a significant reduction in a circuit propagation time delay (∼5.5 ps). © 1963-2012 IEEE.