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Development of a fluorescence based flux sensor for thin film growth and nanoparticle deposition

机译：开发用于薄膜生长和纳米颗粒沉积的基于荧光的流量传感器

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摘要

status: published

机译：状态：已发布

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作者
De Roo Bert; Vervaele Mattias; Rajala Markku; Miller Toni; Guillon Herve; Seo Jin Won; Locquet Jean-Pierre;
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年度 2016
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正文语种 en
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1. Uniform growth of SiC single crystal thin films via a metal-Si alloy flux by vapour-liquid-solid pulsed laser deposition: the possible existence of a precursor liquid flux film [J] . Onuma Aomi, Maruyama Shingo, Mitani Takeshi, CrystEngComm . 2016,第1期

机译：汽-液-固脉冲激光沉积通过金属硅合金通量使SiC单晶薄膜均匀生长：可能存在前驱液通量膜
2. A Humidity Sensor Based on Silver Nanoparticles Thin Film Prepared by Electrostatic Spray Deposition Process [J] . ThutiyapornThiwawong, KorakotOnlaor, BenchapolTunhoo Advances in materials science and engineering . 2013,第1期

机译：静电喷涂沉积银纳米颗粒薄膜湿度传感器
3. Nonenzymatic cholesterol sensor based on spontaneous deposition of platinum nanoparticles on layer-by-layer assembled CNT thin film [J] . Jiao Yang, Hyuck Lee, Misuk Cho, Sensors and Actuators . 2012,第期

机译：基于铂纳米粒子自发沉积在逐层组装的CNT薄膜上的非酶促胆固醇传感器
4. Growth of Cu-Rich/Poor CuInS2 Thin Films by the Sequential Modulated Flux DepositionTechnique [C] . A. Bollero, M. Grossberg, T. Raadik Materials Research Society Symposium . 2009

机译：通过顺序调制助熔剂沉积技术通过Cu - 富含/差的Cuins2薄膜生长
5. Metallorganic chemical vapor deposition and atomic layer deposition approaches for the growth of hafnium-based thin films from dialkylamide precursors for advanced CMOS gate stack applications [D] . Consiglio, Steven P. 2007

机译：金属有机化学气相沉积和原子层沉积方法，用于从二烷基酰胺前体中生长ha基薄膜，用于高级CMOS栅极堆叠应用
6. Sensors for optical thermometry based on luminescence from layered YVO4: Ln3+ (Ln = Nd Sm Eu Dy Ho Er Tm Yb) thin films made by atomic layer deposition [O] . Michael N. Getz, Ola Nilsen, Per-Anders Hansen -1

机译：基于层状YVO4发光的光学测温传感器：Ln3 +（Ln3 = NdSmEuDyHoErTmYb）通过原子层沉积制成的薄膜
7. Development of a fluorescence based flux sensor for thin film growth and nanoparticle deposition [O] . Bert De Roo, Mattias Vervaele, Markku Rajala, 2016

机译：用于薄膜生长和纳米颗粒沉积的荧光基磁通传感器的研制

Development of a fluorescence based flux sensor for thin film growth and nanoparticle deposition

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