Application of bimodal standing wave piezomotors is complicated by problems related to the non-linear friction drive mechanism between drive point and slider, e.g. particle contamination, heat generation and structural vibrations. An advanced contact model based on Kalker’s rolling theory is included in a lumped-parameter systemrepresenting suspension dynamics, piezomotor dynamics and slider/bearing dynamics. This model allows studying the influence of several design parameters on setup performance. Simulation results are presented and qualitatively assessed.
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