Synthesis and characterization of carbon nanotubes using scanning probe based nano-lithographic techniques

摘要

A novel process which does not require the traditional Chemical VaporDeposition (CVD) synthesis techniques and which works at temperatures lower than theconventional techniques was developed for synthesis of carbon nanotubes (CNT). Thesubstrates used for this study involved MEMS (Micro Electrical Mechanical Systems)elements and passive elements. These were coated with Fullerene using Physical VaporDeposition or through a solution in an organic solvent. Catalyst precursors weredeposited on these Fullerene coated substrates using ?wet processes?. These substrateswere then heated using either the integrated microheaters or external heaters in an inertatmosphere to obtain CNT. Thus, in this process we tried to obviate the Chemical VaporDeposition (CVD) process for synthesis of CNT (SWCNT and MWCNT). Thesynthesized CNT will be characterized using Scanning Electron Microscopy and Ramanspectroscopy techniques. Also, conductivity measurements were carried out for thesynthesized tubes using Dry (contact based) and Wet (electro-chemical) methods. Thiswork also proves the concept for the feasibility for a portable hand held instrument forsynthesis of CNT with tunable ?on demand? chirality.