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Evaluation of Anisotropic Conductive Films Based on Vertical Fibers for Post-CMOS Wafer-Level Packaging

机译:基于垂直纤维的各向异性导电膜用于CMOS后晶圆级封装的评估

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摘要

In this paper, we investigate the mechanical and electrical properties of an anisotropic conductive film (ACF) on the basis of high-density vertical fibers for a wafer-level packaging (WLP) application. As part of the WaferBoard, audreconfigurable circuit platform for rapid system prototyping,udACF is used as an intermediate film providing compliant andudvertical electrical connection between chip contacts and a top surface of an active wafer-size large-area IC. The chosen ACF is first tested by an indentation technique. The results show that the elastic–plastic deformation mode as well as the Young’s modulus and the hardness depend on the indentation depth. Second, the efficiency of the electrical contact is tested using a uniaxial compression on a stack comprising a dummy ball grid array (BGA) board, an ACF, and a thin Al film. For three bump diameters, as the compression increases, the resistance values decrease before reaching low and stable values. Despite the BGA solder bumps exhibit plastic deformation after compression, no damage is found on the ACF film. These results show that vertical fiber ACFs can be used for nonpermanent bonding in a WLP application.
机译:在本文中,我们基于晶圆级封装(WLP)应用中的高密度垂直纤维,研究了各向异性导电膜(ACF)的机械和电气性能。作为WaferBoard的一部分, udACF可用于快速系统原型设计的电路平台, udACF用作中间膜,可在芯片触点和有源晶圆尺寸大面积IC的顶表面之间提供顺应和垂直的电连接。所选的ACF首先通过压痕技术进行测试。结果表明,弹塑性变形模式以及杨氏模量和硬度取决于压痕深度。其次,在包括虚拟球栅阵列(BGA)板,ACF和薄Al膜的叠层上使用单轴压缩来测试电触点的效率。对于三个凸块直径,随着压缩的增加,电阻值在达到低值和稳定值之前减小。尽管BGA焊料凸块在压缩后呈现塑性变形,但在ACF膜上未发现损坏。这些结果表明,垂直纤维ACF可以用于WLP应用中的非永久粘合。

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