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Effect of Operating Conditions of KrF Excimer Laser on Crystallinity of Deposits in LCVD from Mo(CO)₆

机译：KRF准分子激光器操作条件对Mo（CO）_{6 LCVD中沉积物结晶度的影响}

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Akio WATANABE; Yoji IMAI; Kazuo OSATO; Masakazu MUKAIDA; Ko-ichi SUGAWARA; Harutoshi TAKEO; Tetsuya KAMEYAMA; Kenzo FUKUDA;
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1. Comparison of modifications induced by ArF excimer laser irradiation on silicon nitride films deposited by different LCVD methods [J] . Banerji N., Serra C., Chiussi S., Surface & Coatings Technology . 1998,第1a3期

机译：ArF准分子激光辐照不同LCVD方法沉积的氮化硅膜上引起的修饰的比较
2. Fabrication of crystalline Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system [J] . Shih-Che Hung, Shu-Chia Shiu, Cha-Hsin Chao, Journal of Vacuum Science & Technology . 2009,第3期

机译：使用均质KrF准分子激光重整系统制备具有原子级表面光滑度的晶体Si球
3. Periodic structure with a periodicity of 2-3.5 jim on crystalline TiO_2 induced by unpolarized KrF excimer lasers [J] . Rong He, Hongliang Ma, Jiahui Zheng, Applied Physics . 2016,第8期

机译：非偏振KrF准分子激光在晶体TiO_2上具有周期为2-3.5 jim的周期性结构
4. Rapid formation of deeply doped layer in crystalline silicon using KrF excimer laser-driven diffusion [C] . Jyumonji, M., Sugioka, . 1996

机译：使用KrF准分子激光驱动扩散在晶体硅中快速形成深掺杂层
5. Crystalline silicon thin films for thin-film transistor applications via excimer laser irradiation. [D] . Sposili, Robert Stephen. 2001

机译：通过准分子激光辐照用于薄膜晶体管的晶体硅薄膜。
6. Fine retinal crystalline deposits observed by confocal scanning laser ophthalmoscopic examination using infrared light [O] . Y Yanagi, Y Tamaki, H Fukushima 2003

机译：共焦扫描激光检眼镜使用红外光观察到的视网膜细小晶体沉积物
7. The study of p-Si/Al2O3/n-Si (100) sandwiches structures deposited by KrF excimer laser ablation. [O] . Calin Moise, Oana Brincoveanu, Adrian Katona, 2016

机译：KRF准分子激光烧蚀沉积的P-Si / Al2O3 / N-Si（100）夹心结构的研究。
8. Amorphous diamond-like carbon film growth by KrF- and ArF- excimer laser PLD: Correlation with plume properties [R] . Puretzky, A. A. , Geohegan, D. B. , Jellison, G. E. 1995

机译：通过KrF-和arF-准分子激光pLD生长无定形类金刚石碳膜：与羽流特性的相关性

Effect of Operating Conditions of KrF Excimer Laser on Crystallinity of Deposits in LCVD from Mo(CO)6

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Effect of Operating Conditions of KrF Excimer Laser on Crystallinity of Deposits in LCVD from Mo(CO)₆