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Clean Room Structure, Air Conditioning and Contamination Control Systems in the Semiconductor Fabrication Process

机译：清洁室结构，半导体制造过程中的空调和污染控制系统

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Kwang-Min Choi; Ji-Eun Lee; Kwi-Young Cho; Kwan-Sick Kim; Soo-Hun Cho;
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年度 2015
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1. Performance analysis and improvement of air filtration and ventilation process in semiconductor clean air-conditioning system [J] . Ma Zhiyao, Guan Bowen, Liu Xiaohua, Energy and Buildings . 2020,第Deca期

机译：半导体清洁空调系统中空气过滤和通风过程的性能分析及改进
2. Potential of Total Reflection and Grazing Incidence XRF for Contamination and Process Control in Semiconductor Fabrication [J] . Cornelia Weiss, Joachim Knoth, Heinrich Schwenke, Mikrochimica Acta: An International Journal for Physical and Chemical Methods of Analysis . 2000,第1a4期

机译：全反射和掠入射XRF在半导体制造中污染和过程控制的潜力
3. Imaging of Metal Ions and Nanoparticles on Structured Silicon Surface Using Laser Ablation-Inductively Coupled Plasma-Mass Spectrometer for Contamination Control in Semiconductor Manufacturing Process [J] . Lim H. B., McLachlin Katherine, OConnor Ciaran, IEEE Transactions on Semiconductor Manufacturing . 2021,第2期

机译：使用激光烧蚀电感耦合等离子体质谱仪在结构化硅表面上的金属离子和纳米颗粒的成像，用于污染半导体制造过程中的污染
4. The Future of Micro-Contamination Control in Chemical Delivery Systems for Advanced Lithography, Wet Etch Clean Semiconductor Processes(PPT) [C] . Thomas Phely-Bobin, Paul Trio, Archita Sengupta, Surface Preparation and Cleaning Conference . 2017

机译：高级光刻，湿蚀刻和清洁半导体工艺（PPT）化学输送系统中微污染控制的未来
5. A multi-agent decision process for controlling heating, ventilation, and air-conditioning systems. [D] . Windham, Andrew W. 2014

机译：用于控制加热，通风和空调系统的多主体决策过程。
6. The design fabrication and photocatalytic utility of nanostructured semiconductors: focus on TiO2-based nanostructures [O] . Arghya Narayan Banerjee 2011

机译：纳米结构半导体的设计制造和光催化用途：专注于基于TiO2的纳米结构
7. An Experimental Study on Energy Consumption of Air Washer Outdoor Air Conditioning Systems for Semiconductor Manufacturing Clean Rooms [O] . Ki-Cheol Kim, Hyung-Tae Kim, Gen-Soo Song, 2012

机译：半导体制造洁净室空气垫圈户外空调系统能耗的实验研究
8. Particle contamination control in plasma processing: Building-in reliability for semiconductor fabrication [R] . Selwyn, G. S. 1995

机译：等离子体处理中的颗粒污染控制：半导体制造的内置可靠性

Clean Room Structure, Air Conditioning and Contamination Control Systems in the Semiconductor Fabrication Process

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