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A novel white-light scanning interferometer for absolute nano-scale gap thickness measurement

机译:一种用于绝对纳米级间隙厚度测量的新型白光扫描干涉仪

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摘要

This paper presents a special configuration of white-light scanning interferometer, in which the measured gap is not located in any interference arm of the interferometer, but acts as an amplitude-and-phase modulator of the light source. Compared to the common white-light interferometer, the approach avoids the influence of the chromatic dispersion of the planar plates on the gap thickness measurement. It possesses a large measurement range of from several hundreds of nanometers to tens of microns as well as a high resolution of 0.1 nm, but does not employ any expensive equipment like spectrometer or monochromator. These advantages make our approach quite competent for the practical applications.
机译:本文介绍了白光扫描干涉仪的特殊配置,其中测量的间隙不位于干涉仪的任何干涉臂中,而是用作光源的幅度和相位调制器。与常见的白光干涉仪相比,该方法避免了平板平板的色散对间隙厚度测量的影响。它具有从数百纳米到几十微米的大量测量范围,以及0.1nm的高分辨率,但不采用任何昂贵的设备,如光谱仪或单色仪。这些优势使我们的方法非常有能力对实际应用。

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