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Origins and Contrast of the Electron Signals at Low Accelerating Voltage and with Energy-Filtering in the FE-SEM for High Resolution Imaging

机译：电子信号在低加速电压下的起源和对比度，具有用于高分辨率成像的FE-SEM中的能量滤波

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Hendrix Demers; Nicolas Brodusch; Patrick Woo; Raynald Gauvin;
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年度 2015
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1. High-Resolution and Low-Voltage FE-SEM Imaging and Microanalysis in Materials Characterization [J] . Liu J.author_name/ Materials Characterization . 2000,第4a5期

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3. Selective Backscattered Electron Imaging of Material and Channeling Contrast in Microstructures of Scale on Low Carbon Steel Controlled by Accelerating Voltage and Take-off Angle [J] . Tomohiro Aoyama, Masayasu Nagoshi, Hideki Nagano, ISIJ international . 2011,第9期

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4. A New Registration Technique using Voltage Contrast Images for Low Energy Electron Beam Lithography [C] . Tetsuro Nakasugi, Atsushi Ando, Kazuyoshi Sugihara, Conference on Emerging Lithographic Technologies Ⅴ Feb 27-Mar 1, 2001, Santa Clara, USA . 2001

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7. High contrast BSE Imaging under Ultra Low Voltage condition by FE-SEM with Energy Filtering [O] . Y. Hashimoto, T. Matsuzaki, H. Ito, 2013

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Origins and Contrast of the Electron Signals at Low Accelerating Voltage and with Energy-Filtering in the FE-SEM for High Resolution Imaging

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