首页> 外文OA文献 >Microscopy and spectroscopy characterization of small defects on 200mm wafers

【2h】

Microscopy and spectroscopy characterization of small defects on 200mm wafers

机译：200mm晶圆上小缺陷的显微镜和光谱表征

代理获取

本网站仅为用户提供外文OA文献查询和代理获取服务，本网站没有原文。下单后我们将采用程序或人工为您竭诚获取高质量的原文，但由于OA文献来源多样且变更频繁，仍可能出现获取不到、文献不完整或与标题不符等情况，如果获取不到我们将提供退款服务。请知悉。

页面导航

著录项
引文网络
相似文献
相关主题

著录项

作者
C. R. Brundle; Yuri Uritsky; Patrick Kinney; Walter Huber; Andrew Green;
展开▼
作者单位

展开▼
年度 1998
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. Nondestructive Defect Characterization of Saw-Damage-Etched Multicrystalline Silicon Wafers Using Scanning Electron Acoustic Microscopy [J] . Meng L., Papa Rao S. S., Bhatia C. S., Photovoltaics, IEEE Journal of . 2013,第1期

机译：锯齿损伤刻蚀的多晶硅晶片的非破坏性缺陷特征的扫描电子声显微镜
2. Characterization of triangular-defects in 4°off 4H-SiC epitaxial wafers by synchrotron X-ray topography and by transmission electron microscopy [J] . T.Yamashita, K.Momose, D.Muto, Materials science forum . 2012,第PTa1期

机译：同步加速器X射线形貌和透射电子显微镜表征4°off 4H-SiC外延晶片中的三角形缺陷
3. Laser helical drilling of silicon wafers with ns to fs pulses: Scanning electron microscopy and transmission electron microscopy characterization of drilled through-holes [J] . J. Kaspar, A. Luft, S. Nolte, Journal of Laser Applications . 2006,第2期

机译：用ns到fs脉冲对硅晶片进行激光螺旋钻孔：钻孔通孔的扫描电子显微镜和透射电子显微镜表征
4. Microscopy and Spectroscopy Characterization of Small Defects on 200 mm wafers [C] . C.R.Brundle, Yuri Uritsky, patrick Kinney, . 1998

机译：显微镜和光谱表征200 mm晶圆上的小缺陷
5. Defect Characterization of 4H-SiC by Deep Level Transient Spectroscopy (DLTS) and Influence of Defects on Device Performance [D] . Mannan, Mohammad Abdul 2015

机译：用深层瞬态光谱法（DLTS）表征4H-SiC的缺陷及其对器件性能的影响
6. Visualizing chemical states and defects induced magnetism of graphene oxide by spatially-resolved-X-ray microscopy and spectroscopy [O] . Y. F. Wang, Shashi B. Singh, Mukta V. Limaye, -1

机译：通过空间分辨X射线显微镜和光谱法观察氧化石墨烯的化学状态和缺陷诱导的磁性
7. Characterization of Epitaxial Layer Defects in Silicon Wafers Using Focused Ion Beam and Transmission Electron Microscopy [O] . J–H Cho, D–H Cho, C–W Lee, 2005

机译：使用聚焦离子束和透射电子显微镜的硅晶片中外延层缺陷的表征
8. Improved Optical Spectroscopy Technique - Graphite Defects Observed by Electron Microscopy - Principles of Self-Modulating Derivative Optical Spectroscopy - Ricerche di fisica dei solidi presso il Laboratorio di Microscopia Elettronica dell'IEN [R] . GUIDO BONFIGLIOLI, PIERO BROVETTO, ADRIANA MOJONI 1964

机译：改进的光谱技术 - 电子显微镜观察到的石墨缺陷 - 自调制衍生光学光谱学原理 - Ricerche di fisica dei solidi presso il Laboratorio di microscopia Elettronica dell'IEN

Microscopy and spectroscopy characterization of small defects on 200mm wafers

著录项

引文网络

相似文献

相关主题

期刊订阅