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Built-in Lens Mask Technology for Generating Three Dimensional Image based on Computational Lithography

机译：基于计算光刻产生三维图像的内置镜头掩模技术

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Akio Misaka; Daiki Sugihara; Kousuke Sato; Masaru Sasago; Yoshihiko Hirai;
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年度 2019
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1. Built-in Lens Mask Technology for Generating Three Dimensional Image based on Computational Lithography [J] . Misaka Akio, Sugihara Daiki, Sato Kousuke, Journal of Photopolymer Science and Technology . 2019,第2期

机译：基于计算光刻产生三维图像的内置镜头掩模技术
2. Built-in Lens Mask Technology for Generating Three Dimensional Image based on Computational Lithography [J] . Akio Misaka, Daiki Sugihara, Kousuke Sato, Journal of Photopolymer Science and Technology . 2019,第2期

机译：基于计算光刻的内置镜头遮罩技术可生成三维图像
3. Three-dimensional imaging approach using built-in lens mask lithography [J] . Tanaka Toshiki, Kikuta Hisao, Kawata Hiroaki, Microelectronic Engineering . 2016,第Juna期

机译：使用内置镜头掩模光刻的三维成像方法
4. Optimization from Design Rules, Source and Mask, to Full Chip with a Single Computational Lithography Framework: Level-Set-Methods-based Inverse Lithography Technology (ILT) [C] . Linyong Pang, Danping Peng, Peter Hu, Conference on optical microlithography XXIII . 2010

机译：使用单个计算光刻框架从设计规则，源和掩模到全芯片的优化：基于水平集方法的逆光刻技术（ILT）
5. Utilizing Image-based Formats to Optimize Pattern Data Format and Processing In Mask and Maskless Pattern Generation Lithography [D] . Abboud, Fayez Elias. 2012

机译：利用基于图像的格式，以优化模式数据格式和掩模和掩模模式生成光刻的处理
6. Scalable Fabrication of Quasi-Three-Dimensional Chiral Plasmonic Oligomers Based on Stepwise Colloid Sphere Lithography Technology [O] . Shiwei Xie, Jinzhe Yang, Xiao Xiao, 2015

机译：基于逐步胶体球面光刻技术的准三维手性等离子体低聚物的可扩展制备
7. Optimization from Design Rules, Source and Mask, to Full Chip with a Single Computational Lithography Framework: Level-Set-Methods- based Inverse Lithography Technology (ILT) [O] . Linyong Pang, Danping Peng, Peter Hu, 2014

机译：利用单一计算光刻框架优化从设计规则，源和掩模到全芯片：基于水平集方法的逆光刻技术（ILT）

Built-in Lens Mask Technology for Generating Three Dimensional Image based on Computational Lithography

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