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Study on a Stylus Profiling Instrument Based on a Fine and Coarse Dual-Servo Mechanism. Measuring Principle and a Few Measurement Results.

机译：基于精细和粗双伺服机制的触控笔分析仪研究。测量原理和一些测量结果。

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Takeshi KUMADA; Kimiyuki MITSUI; Kazuo NAKAJIMA; Hideyuki NAMATAME;
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年度 1997
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Study on a Stylus Profiling Instrument Based on a Fine and Coarse Dual-Servo Mechanism. Measuring Principle and a Few Measurement Results.

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