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Sensitivity and resonance frequency with changing the diaphragm diameter of piezoelectric micromachined ultrasonic transducers

机译：改变压电微机械超声换能器的隔膜直径的灵敏度和共振频率

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Daisuke Akai; Takeo Katori; Daisuke Takashima; Makoto Ishida;
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1. An Analytical Equivalent Circuit Model for Optimization Design of a Broadband Piezoelectric Micromachined Ultrasonic Transducer With an Annular Diaphragm [J] . Qiao Liao, Li Qian, Qiu Chaorui, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control . 2019,第11期

机译：具有环形膜片的宽带压电微机械超声换能器优化设计的解析等效电路模型
2. AlN-on-Si Square Diaphragm Piezoelectric Micromachined Ultrasonic Transducer with Extended Range of Detection [J] . Suresh Alasatri, Libor Rufer, Joshua En-Yuan Lee Proceedings . 2018,第13期

机译：AlN-on-Si方形膜片压电微机械超声换能器，具有广泛的检测范围
3. An analytical solution for curved piezoelectric micromachined ultrasonic transducers with spherically shaped diaphragms [J] . Sammoura F., Akhbari S., Lin L. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control . 2014,第9期

机译：球形膜片弯曲压电微机械超声换能器的解析解
4. Sensitivity and Resonance Frequency with Changing the Diaphragm Diameter of Piezoelectric Micromachined Ultrasonic Transducers [C] . Daisuke Akai, Takeo Katori, Daisuke Takashima, Irago Conference . 2016

机译：改变压电微机械超声换能器的隔膜直径的灵敏度和共振频率
5. Design and Modeling of Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Using a Multi-User MEMS Process for Medical Imaging [D] . Antony Balasingam, Jenitha. 2020

机译：使用多用户MEMS工艺进行压电微机械超声换能器（PMUT）的医学成像设计与建模
6. Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array [O] . Xu-Bo Wang, Le-Ming He, You-Cao Ma, 2021

机译：宽带高频压电微机械超声换能器阵列的开发
7. Piezoelectric micromachined ultrasonic transducers with rectangular diaphragms for dual-frequency applications [O] . Chao C, Lam TY, Kwok KW, 2007

机译：具有矩形膜片的压电微加工超声换能器，用于双频应用

Sensitivity and resonance frequency with changing the diaphragm diameter of piezoelectric micromachined ultrasonic transducers

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