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Development of 'Sumiclean M' Stainless Steel for High Purity Gas Delivery System in Semiconductor Manufacturing.

机译：半导体制造中高纯度气体输送系统的“SumiClean M”不锈钢的研制。

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Shigeki Azuma; Hiroyuki Hirata; Masaaki Terunuma; Munekatsu Furugen;
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年度 1996
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1. Ultra-Pure and Ultra-Low Mn 316L Stainless Steel "SUMICLEAN M" for Semiconductor Manufacturing Gas Application [J] . Hiroshi Teranishi, Munekatsu Furugen, Shigeki Azuma 住友金属 . 1997,第4期

机译：超纯和超低锰316L不锈钢“ SUMICLEAN M”，用于半导体制造气体应用
2. Desorption of moisture from stainless steel tubes and alumina filters in high purity gas distribution systems [J] . Haider A.M., Shadman F. IEEE Transactions on Components, Hybrids, and Manufacturing Technology . 1991,第3期

机译：高纯度气体分配系统中不锈钢管和氧化铝过滤器中水分的解吸
3. Investigation of Stainless Steel Corrosion in Ultrahigh-Purity Water and Steam Systems by Surface Analytical Techniques [J] . Xia Doug, Ronald G. Iacocca, Bethany L. Bustard, Journal of Materials Engineering and Performance . 2010,第1期

机译：表面分析技术研究超高纯水和蒸汽系统中不锈钢的腐蚀
4. Machinability of the high-purity stainless steels for ultra-clean gas supply systems [C] . Tadahisa Akasawa, Yoichi Baba, Shingo Kisita, International Conference on Progress of Machining Technology . 2000

机译：用于超清洁气体供应系统的高纯度不锈钢的可加工性
5. Characterization and control of molecular contaminants on oxide nanoparticles and in ultra high purity gas delivery systems for semiconductor manufacturing. [D] . Wang, Hao. 2013

机译：表征和控制氧化物纳米颗粒以及用于半导体制造的超高纯气体传输系统中的分子污染物。
6. Plasma Deposition and UV Light Induced Surface Grafting Polymerization of NIPAAm on Stainless Steel for Enhancing Corrosion Resistance and Its Drug Delivery Property [O] . Ko-Shao Chen, Shu-Ju Chang, Chi-Kuang Feng, 2018

机译：NIPAAm在不锈钢上的等离子沉积和紫外光诱导的表面接枝聚合反应以提高其耐腐蚀性和药物传递性能
7. Development of 'Sumiclean F' Stainless Steel Tubing Covered with 100Cr2O3 Film for Ultra High Purity Gas Distribution. [O] . Shigeki Azuma, Hiroshi Teranishi, Hiroshi Okamoto, 1999

机译：“SumiClean F”不锈钢管的开发覆盖100％CR2O3薄膜，用于超高纯度气体分布。
8. Steel: Monitoring Developments in the Domestic Industry (Investigation No. TA-204-9). Steel-Consuming Industries: Competitive Conditions with Respect to Steel Safeguard Measures (Investigation No. 332-452). Volume 2: Investigation No. TA-204-9 (Part 2) (Tubular and Stainless Products and Appendices). [R] . 2003

机译：钢铁：监测国内产业的发展情况（调查编号Ta-204-9）。钢铁消费行业：有关钢铁保障措施的竞争条件（第332-452号调查）。第2卷：调查编号Ta-204-9（第2部分）（管状和不锈钢制品及附录）。

Development of 'Sumiclean M' Stainless Steel for High Purity Gas Delivery System in Semiconductor Manufacturing.

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