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Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle ) Derivatives with Pendant Alkoxyl and Adamantyl Ester Groups

机译：基于诺里亚（水轮状宏型）衍生物的极端紫外（EUV） - 具有侧链烷氧基和亚氨基酯基团的衍生物

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Hiroto Kudo; Nobumitssu Nina; Tomoharu Sato; Hiroaki Oizumi; Toshiro Itani; Tokuro Miura; Takeo Watanabe; Hiroo Kinoshita;
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年度 2012
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1. Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle ) Derivatives with Pendant Alkoxyl and Adamantyl Ester Groups [J] . Hiroto Kudo, Nobumitsu Niina, Tomoharu Sato Journal of Photopolymer Science and Technology . 2012,第5期

机译：基于带有悬链烷氧基和金刚烷基酯基团的Noria（水轮状大环）衍生物的耐极端紫外线（EUV）材料
2. Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle ) Derivatives with Pendant Alkoxyl and Adamantyl Ester Groups [J] . Hiroto Kudo, Nobumitssu Nina, Tomoharu Sato, Journal of Photopolymer Science and Technology . 2012,第5期

机译：基于带有悬链烷氧基和金刚烷基酯基团的Noria（水轮状大环）衍生物的耐极端紫外线（EUV）材料
3. Synthesis and property of noria (water-wheel like macrocycle) derivatives with pendant alkoxyl and adamantyl ester groups, and their application for extreme ultraviolet resist [J] . Nobumitsu Niina, Hiroto Kudo, Hiroaki Oizumi, Thin Solid Films . 2013,第maya1期

机译：具有侧链烷氧基和金刚烷基酯基的诺里亚（水轮状大环）衍生物的合成，性能及其在极紫外光抗蚀剂中的应用
4. Synthesis of New Ladder Cyclic Materials (Noria Derivatives) with Photo-Reactive Groups and Their Application to EUV-Resists, EB-Resists and Photo-Curable Materials [C] . TADATOMINISHIKUBO, HIROTO KUDO Radtech International UV and EB Curing Technology Exposition and Conference . 2011

机译：用光反应性基团合成新梯形循环材料（NORIA衍生物）及其在EUV抗蚀剂，EB抗蚀剂和光固化材料中的应用
5. Novel Noria (Water Wheel-Like Cyclic Oligomer) Derivative as a Chemically Amplified Extreme Ultraviolet (EUV)-Resist Material [O] . Tadatomi Nishikubo, Hiroto Kudo, Yuji Suyama, 2009

机译：新型诺里亚（水轮状环状低聚物）衍生物作为化学扩增的极端紫外（EUV） - 售后材料

Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle ) Derivatives with Pendant Alkoxyl and Adamantyl Ester Groups

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