首页> 外文OA文献 >Comparison of Resist Family Outgassing Characterization between EUV and EB

【2h】

Comparison of Resist Family Outgassing Characterization between EUV and EB

机译：EUV和EB之间的抵抗家庭分散特征的比较

代理获取

本网站仅为用户提供外文OA文献查询和代理获取服务，本网站没有原文。下单后我们将采用程序或人工为您竭诚获取高质量的原文，但由于OA文献来源多样且变更频繁，仍可能出现获取不到、文献不完整或与标题不符等情况，如果获取不到我们将提供退款服务。请知悉。

页面导航

著录项
引文网络
相似文献
相关主题

著录项

作者
Isamu Takagi; Toshiya Takahashi; Norihiko Sugie; Kazuhiro Katayama; Yukiko Kikuchi; Eishi Shiobara; Hiroyuki Tanaka; Soichi Inoue; Takeo Watanabe; Tetsuo Harada; Hiroo Kinoshita;
展开▼
作者单位

展开▼
年度 2013
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. Comparison of Resist Family Outgassing Characterization between EUV and EB [J] . Isamu Takagi, Toshiya Takahashi, Norihiko Sugie Journal of Photopolymer Science and Technology . 2013,第5期

机译：EUV和EB之间的抗性家庭除气特性比较
2. Comparison of Resist Family Outgassing Characterization between EUV and EB [J] . Isamu Takagi, Toshiya Takahashi, Norihiko Sugie, Journal of Photopolymer Science and Technology . 2013,第5期

机译：EUV和EB之间的抗性家庭除气特性比较
3. Comparison of Resist Outgassing Characterization between High Power EUV and EB [J] . Norihiko Sugie, Toshiya Takahashi, Kazuhiro Katayama Journal of Photopolymer Science and Technology . 2012,第5期

机译：大功率EUV与EB的抗除气特性比较
4. Resist outgassing characterization for qualification in high power EUV lithography [C] . Toshiya Takahashi, Norihiko Sugie, Kazuhiro Katayama, Conference on extreme ultraviolet (EUV) lithography III . 2012

机译：耐除气表征，可用于大功率EUV光刻
5. Debris characterization and mitigation of droplet laser plasma sources for EUV lithography. [D] . Takenoshita, Kazutoshi. 2006

机译：用于EUV光刻的液滴激光等离子体源的碎片表征和缓解。
6. The Design and Characterization of a Prototype Wideband Voltage Sensor Based on a Resistive Divider [O] . Fernando Garnacho, Abderrahim Khamlichi, Jorge Rovira 2017

机译：基于电阻分压器的原型宽带电压传感器的设计与表征
7. EUV Resist Outgassing: Quantification and Release Mechanisms [O] . Shinji Kobayashi, Julius Joseph Santillan, Toshiro Itani 2008

机译：EUV抵抗突出：量化和释放机制
8. Characterization of advanced EUV resists using the Berkeley METtool [R] . 2006

机译：使用Berkeley mETtool表征先进的EUV抗蚀剂

Comparison of Resist Family Outgassing Characterization between EUV and EB

著录项

引文网络

相似文献

相关主题

期刊订阅