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Readying Directed Self-Assembly for Patterning in Semi-Conductor Manufacturing

机译：读取定向自组装以在半导体制造中进行图案化

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Roel Gronheid; Paulina Rincon Delgadillo; Arjun Singh; Todd R. Younkin; Safak Suyan; Boon Teik Chan; Lieve Van Look; Joost Bekaert; Ivan Pollentir; Paul F. Nealey;
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1. Readying Directed Self-Assembly for Patterning in Semi-Conductor Manufacturing [J] . Roel Gronheid, Paulina Rincon Delgadillo, Arjun Singh Journal of Photopolymer Science and Technology . 2013,第6期

机译：读取定向自组装以进行半导体制造中的图案形成
2. Readying Directed Self-Assembly for Patterning in Semi-Conductor Manufacturing [J] . Roel Gronheid, Paulina Rincon Delgadillo, Arjun Singh, Journal of Photopolymer Science and Technology . 2013,第6期

机译：读取定向自组装以进行半导体制造中的图案形成
3. Hybrid patterns from directed self-assembly of diblock copolymers by chemical patterns [J] . Zhao Wenfeng, Li Weihua Physical chemistry chemical physics: PCCP . 2019,第34期

机译：通过化学图案来自二嵌段共聚物的定向自组装的杂种图案
4. Novel metrology methods for fast 3D characterization of Directed Self-Assembly (DSA) patterns for high volume manufacturing [C] . Chandra Sarma, Benjamin Bunday, Aron Cepler, Metrology, inspection, and process control for microlithography XXVIII . 2014

机译：用于大规模生产的定向自组装（DSA）模式的快速3D表征的新型计量方法
5. Numerical Simulations of Directed Self-assembly Methods in Di-block Copolymer Films for Efficient Manufacturing of Nanoscale Patterns with Long-range Order [D] . ?Hill, Joseph 2020

机译：二嵌段共聚物薄膜中定向自组装方法的数值模拟，用于高范围阶的纳米级图案的高效制造
6. Directed Kinetic Self-Assembly of Mounds on Patterned GaAs (001): Tunable Arrangement Pattern Amplification and Self-Limiting Growth [O] . Chuan-Fu Lin, Hung-Chih Kan, Subramaniam Kanakaraju, 2014

机译：在图案化的GaAs（001）上定向的丘堆动力学自组装：可调整的排列模式放大和自限生长
7. Direct Patterning of a Cyclotriveratrylene Derivative for Directed Self-Assembly of C60 [O] . Osner, Zachary R., Nyamjav, Dorjderem, Holz, Richard C., 2011

机译：直接图案化C60定向自组装的亚环戊三烯衍生物

Readying Directed Self-Assembly for Patterning in Semi-Conductor Manufacturing

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